PURPOSE: To improve workability and durability by allowing the raising part of flocked cloth for polishing a metal article to be applied with inorganic compounds by sputtering method.
CONSTITUTION: An article to be applied with sputtering is the flocked cloth 4 as the basic material for polishing cloth and wound onto a pair of rolls 5 and 6, and wound successively from the roll 6 to the roll 5 by a driving apparatus 7 which revolution-drives one roll 5. A sputtering apparatus 1 is set into decompressed argon gas environment, and the flocked cloth 4 is slowly transferred from the roll 6 to the roll 5, in the state where high-frequency electric power is applied onto an electrode 2, and then inorganic substance is sputtered onto the raising part of the flocked cloth 4. Therefore, as for the polishing cloth thus formed, the top edge of the raising part is not easily fused, even if frictional heat is generated in polishing work, since the raising part contains inorganic substance, and therefore the polishing speed is increased, and the superior durability is assured, and service life is prolonged, and electrification is prevented, if metal oxides are sputtered onto the raising part, and clogging is prevented.
TSUTSUI MASATOSHI
FUNAHASHI RIICHI
SUZUKI TOSHINOBU
SUZUKI MASAYUKI
NISHIBAYASHI YOSHIBUMI
SUZUTORA SEISEN KOUJIYOU KK