Title:
研磨用組成物および研磨方法
Document Type and Number:
Japanese Patent JP4171858
Kind Code:
B2
Inventors:
Keiichi Bessho
Makoto Higami
Toshio Ono
Katsuhiro Ishikawa
Makoto Higami
Toshio Ono
Katsuhiro Ishikawa
Application Number:
JP26645499A
Publication Date:
October 29, 2008
Filing Date:
September 21, 1999
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C09K3/14; H01L21/304; C11D3/14; C11D3/37
Domestic Patent References:
| JP6487146A | ||||
| JP10102041A | ||||
| JP10102042A | ||||
| JP11188614A | ||||
| JP9143483A | ||||
| JP2000313815A | ||||
| JP63272459A | ||||
| JP9194824A |
Attorney, Agent or Firm:
Shigetaka Shirai