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Patent Searching and Data


Title:
POLISHING COMPOSITION
Document Type and Number:
Japanese Patent JP2008243857
Kind Code:
A
Abstract:

To provide a polishing composition that can suppress recess or dishing and is high in polishing rate.

The polishing composition is preferable to a metallic film, preferably a copper film and contains ammonia, ammonium salt and hydrogen peroxide, organic acid having two or more carboxyl radicals, and anticorrosive, and the residue is water. By containing these components, this composition is used particularly for a second step polishing, recess and dishing are suppressed. Maleic acid, oxalic acid and fumaric acid are preferable as the organic acid, and benzotriazol is preferable as the anticorrosive.


Inventors:
MATSUMURA YOSHIYUKI
NITTA HIROSHI
Application Number:
JP2007077869A
Publication Date:
October 09, 2008
Filing Date:
March 23, 2007
Export Citation:
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Assignee:
NITTA HAAS INC
International Classes:
H01L21/304; B24B37/00; C09K3/14
Attorney, Agent or Firm:
Keiichiro Saikyo
Takeshi Sugiyama