Title:
研磨用組成物
Document Type and Number:
Japanese Patent JP7061965
Kind Code:
B2
Abstract:
Provided is a polishing composition that includes a cellulose derivative and is effective for reducing surface defects after polishing. According to the present application, a polishing composition comprising an abrasive, a basic compound and a surface protective agent is provided. The surface protective agent contains a cellulose derivative and a vinyl alcohol-based dispersant. The surface protective agent has a dispersibility parameter α of less than 100.
Inventors:
Kosuke Tsuchiya
Maki Asada
Maki Asada
Application Number:
JP2018552519A
Publication Date:
May 02, 2022
Filing Date:
November 15, 2017
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
C09K3/14; B24B37/00; C09G1/02; H01L21/304
Domestic Patent References:
| JP2005085858A |
Foreign References:
| WO2014126051A1 |
Attorney, Agent or Firm:
Makoto Abe
Michiko Oi
Masafumi Tani
Michiko Oi
Masafumi Tani
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