POLISHING DEVICE USING FROZEN PARTICLE - MITSUBISHI ELECTRIC CORP

Title:

POLISHING DEVICE USING FROZEN PARTICLE

Document Type and Number:

Japanese Patent JPH0435872

Kind Code:

A

Abstract:

PURPOSE: To polish the surface of the body to be polished extremely efficiently without its damaging, by providing a particle hardness adjusting means capable of adjusting the hardness of a ultrafine frozen particle formed by a frozen particle forming means variably.

CONSTITUTION: The hardness of an ultrafine frozen particle formed by a frozen particle forming means 1 is adjusted so as to be adapted for the hardness of the body 4 to be polished by a particle hardness adjusting means 3. It is thus polished efficiently without damaging the surface with the frozen particle whose hardness is adjusted being injected on the surface of the body 4 to be polished from a blasting means 5 as abrasives.

Inventors:

HISASUE AKIKO
SUGANO ITARU
FUKUMOTO HAYAAKI

Application Number:

JP13827790A

Publication Date:

February 06, 1992

Filing Date:

May 30, 1990

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

B24C1/00; B24C7/00; B24C11/00; H01L21/304; (IPC1-7): B24C1/00; H01L21/304

Attorney, Agent or Firm:

Mitsuteru Soga (5 people outside)

Next Patent: BLASTING DEVICE