To provide a polishing device in which the grinding wheel is never inclined even though the rotary shaft of the grinding wheel is removed from the outer periphery of an article to be polished, the dressing process is carried out efficiently, the polishing work efficiency is good, and the small size of the device can be realized.
An article to be polished 100 held on a substrate holder 10, and a dresser 200 held on a dresser holder 30, are set to make the polishing surface of the article 100 and the dressing surface of the dresser 200 in the same surface. A cup type grinding wheel 50 is set to stride both the article to be polished 100 and the dresser 200. The grinding wheel surface of the cup type grinding wheel 50 is regenerated by the dresser 200 at a time, while polishing the polishing surface of the article 100 by the cup type grinding wheel 50.
HIYAMA HIROKUNI
WADA TAKETAKA
HIROKAWA KAZUTO
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