To provide a polishing device that can be used and is hardly broken even in a complicated and highly-precise polish using an actuator in which the displacement amount of expansion-contraction member is magnified by a displacement magnification mechanism.
The polishing device for polishing the surface of an object to be polished by a polishing tool has: the actuator including the expansion-contraction member to be deformed by supplying a voltage or current and the displacement magnification mechanism for magnifying the displacement to be generated in the expansion-contraction member; a center member, in which any one of the polishing tool and the object to be polished is attached to a central part and a plurality of actuators are connected to a periphery; and a driving circuit for supplying a waveform of a required voltage or current to each expansion-contraction member to generate the magnified displacement in each of the connected actuators. The position of the center member is changed in accordance with the displacement to be generated in each of the connected actuators, and consequently the surface of the object to be polished is polished by the relative movement of the object to be polished to the polishing tool.
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SUZUKI HIROFUMI
HAYASHI IMIN
HIGUCHI TOSHIRO
YOSHIDA KAZUFUMI
YANO TAKESHI
MECHANO TRANSFORMER CORP
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