Title:
POLISHING DRUM OF EDGE POLISHING DEVICE
Document Type and Number:
Japanese Patent JPH10296641
Kind Code:
A
Abstract:
To prevent the butt section of a polishing pad from peeling and elongation in mirror machining.
This device is provided with a drum body 30, which rotates around the center axis 10a and a polishing pad 31, which is affixed to the peripheral face of this drum body 30 and mirror machines the edge of a wafer W. Concretely, the polishing pad 31 is stuck to the drum body 30 in such a way that a butt section 32 comprising end faces 33 and 34 butted is inclined at an angle of θ to a rotation direction A. This angle θ is desirable to be set at an angle ranging from 45° to 60°.
Inventors:
KATO TAKETOSHI
Application Number:
JP12645597A
Publication Date:
November 10, 1998
Filing Date:
April 30, 1997
Export Citation:
Assignee:
SPEEDFAM CO LTD
International Classes:
B24D9/04; (IPC1-7): B24D9/04
Attorney, Agent or Firm:
Takakazu Tsukahara