Title:
研磨装置および研磨方法
Document Type and Number:
Japanese Patent JP5348530
Kind Code:
B2
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Inventors:
Atsushi Tanaka
Application Number:
JP2009011165A
Publication Date:
November 20, 2013
Filing Date:
January 21, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B24B51/00; B24B37/04; B24B49/04
Domestic Patent References:
| JP2004009259A | ||||
| JP2000061783A | ||||
| JP5318400A | ||||
| JP2005107854A | ||||
| JP11287629A | ||||
| JP2004154928A | ||||
| JP60238259A | ||||
| JP2004337993A | ||||
| JP2007180366A | ||||
| JP2002052459A | ||||
| JP62282844A | ||||
| JP8229812A | ||||
| JP2005268424A | ||||
| JP6102921A | ||||
| JP2001022422A | ||||
| JP4289059A | ||||
| JP2007313597A |
Attorney, Agent or Firm:
Masago Onishi