Title:
研磨装置及び研磨方法
Document Type and Number:
Japanese Patent JP6522367
Kind Code:
B2
Inventors:
Makoto Ishida
Kawasaki Kenji
Kawasaki Kenji
Application Number:
JP2015035670A
Publication Date:
May 29, 2019
Filing Date:
February 25, 2015
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
B24B49/12; B24B19/00; B24B27/00
Domestic Patent References:
| JP2009160810A | ||||
| JP5138531A | ||||
| JP5057592A | ||||
| JP2002028859A | ||||
| JP2011093004A | ||||
| JP2013063490A | ||||
| JP5318280A | ||||
| JP2006208347A | ||||
| JP9111431A | ||||
| JP6273137A | ||||
| JP6210564A | ||||
| JP3505998A | ||||
| JP4223854A |
Foreign References:
| US20140267887 |
Attorney, Agent or Firm:
Hiroaki Sakai
Jun Takamura
Jun Takamura