Title:
研磨装置
Document Type and Number:
Japanese Patent JP4011892
Kind Code:
B2
Inventors:
Takao Hirahara
Hitoshi Komoriya
Yutaka Nakamura
Hiroyuki Suzuki
Hitoshi Komoriya
Yutaka Nakamura
Hiroyuki Suzuki
Application Number:
JP2001354646A
Publication Date:
November 21, 2007
Filing Date:
November 20, 2001
Export Citation:
Assignee:
富士通株式会社
International Classes:
B24B49/12; B24B37/013; B24B37/04; H01L21/304
Domestic Patent References:
| JP2001235311A | ||||
| JP2001287160A | ||||
| JP2001144059A | ||||
| JP2001135600A |
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima
Nobushige Samejima