研磨装置 - Olympus Endo Technology America Inc.

Title:

研磨装置

Document Type and Number:

Japanese Patent JP4996964

Kind Code:

B2

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Inventors:

Toshikazu Akabane
Naoyuki Kishida

Application Number:

JP2007104681A

Publication Date:

August 08, 2012

Filing Date:

April 12, 2007

Export Citation:

Assignee:

Olympus Endo Technology America Inc.

International Classes:

B24B13/02; B24B13/04

Domestic Patent References:

Attorney, Agent or Firm:

Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui

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