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Patent Searching and Data


Title:
POLISHING HEAD
Document Type and Number:
Japanese Patent JPH07241766
Kind Code:
A
Abstract:

PURPOSE: To provide a polishing head used for polishing work for finishing a workpiece into the surface of extremely high accuracy and enabling rough polishing to finish-polishing of ultrahigh accuracy by a single polishing head.

CONSTITUTION: A polishing head is formed of a rectilinear guide part 7, a rectilinear part 6 disposed in the freely advancing/retreating state in a rectilinear guide part 7, a rotatory-driving part 15 disposed in the rectilinear part 6, a rectilinear driving means for advancing/retreating the rectilinear part 6, a high speed driving means 12 disposed at the rectilinear guide part 7 so as to be able to drive the rectilinear part 6 at high speed, a force detecting means 14 jointed between the high speed driving means 12 and the rotatory-driving part 15 so as to detect reaction from a workpiece, and a force control means 8.


Inventors:
SHINADA KUNINORI
Application Number:
JP3374994A
Publication Date:
September 19, 1995
Filing Date:
March 03, 1994
Export Citation:
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Assignee:
NIKON CORP
International Classes:
B24B41/04; B24B47/10; B24B49/16; (IPC1-7): B24B41/04; B24B47/10; B24B49/16