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Patent Searching and Data


Title:
POLISHING JIG AND POLISHING DEVICE USING IT
Document Type and Number:
Japanese Patent JP2002210652
Kind Code:
A
Abstract:

To replace an O-ring without inserting the upper body or an arm into the under space of a lifted pressurizing plate or working upwardly from the downside, and thus to easily and safely exchange the O-ring.

This polishing jig 28 comprises a disk part 281, a cylindrical wall plate part 282 disposed around the disk part 281, and a plurality of annular grooves 20 formed concentrically to the disk part in the bottom parts of a recessed part 28a and a recessed part 28b formed with the disk part 281 and the cylindrical wall plate part 282. The polishing jig 28 in which O-rings 21 are selectively mounted to the annular grooves 20 is engaged under the pressurizing plate 8. A splash preventing skirt 41 is provided for preventing intrusion of polishing liquid, and can be turned up during working.


Inventors:
INOUE HIROAKI
Application Number:
JP2001007738A
Publication Date:
July 30, 2002
Filing Date:
January 16, 2001
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/04; B24B37/30; H01L21/304; (IPC1-7): B24B37/04; H01L21/304
Domestic Patent References:
JPH01135464A1989-05-29
Attorney, Agent or Firm:
Amano Masakage (1 person outside)