Title:
CMP用研磨液及び研磨方法
Document Type and Number:
Japanese Patent JP5493526
Kind Code:
B2
Inventors:
Takaaki Tanaka
Koji Mishima
Koji Mishima
Application Number:
JP2009165424A
Publication Date:
May 14, 2014
Filing Date:
July 14, 2009
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2008181954A | ||||
| JP2004359927A | ||||
| JP2009055047A |
Foreign References:
| WO2008030576A1 | ||||
| WO2007060869A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu