Title:
金属用研磨液及び研磨方法
Document Type and Number:
Japanese Patent JP5088352
Kind Code:
B2
Inventors:
Hiroshi Ono
Katsuyuki Masuda
Masanobu Hakuro
Katsuyuki Masuda
Masanobu Hakuro
Application Number:
JP2009193052A
Publication Date:
December 05, 2012
Filing Date:
August 24, 2009
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
C09K13/00; B24B37/00; C09K3/14; H01L21/304
Domestic Patent References:
| JP2002164310A | ||||
| JP2002134442A | ||||
| JP8060386A | ||||
| JP2003183628A | ||||
| JP2003034875A | ||||
| JP11172467A | ||||
| JP2000064067A | ||||
| JP11204942A |
Foreign References:
| WO2000013217A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu