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Title:
POLISHING METHOD AND POLISHING APPARATUS
Document Type and Number:
Japanese Patent JP2011036973
Kind Code:
A
Abstract:

To provide a polishing technique capable of improving shape precision of a workpiece.

The polishing method makes a processing work portion 5a relatively scan on a meridian line 18b of an autorotating workpiece 18 with a symmetrical shape with respect to rotational axis while autorotating a spherical polisher 5. Polishing is performed while an angle θ of a normal line 18d in a processing point 18c of the workpiece 18 to a rotational axis 5b of the polisher 5 within a plane orthogonal to a scanning direction of the polisher 5 is gradually reduced from an outer-periphery portion of the workpiece 18 toward the center, thereby attaining polishing by uniform removal amount in the center of the workpiece 18 and at a vicinity portion without changing relative scan speed on the meridian line 18b.


Inventors:
MORII TAKAHIRO
Application Number:
JP2009188751A
Publication Date:
February 24, 2011
Filing Date:
August 17, 2009
Export Citation:
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Assignee:
OLYMPUS CORP
International Classes:
B24B13/04; B24B29/00; B24B49/10
Attorney, Agent or Firm:
Yoshiyuki Osuga