Title:
POLISHING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2001088008
Kind Code:
A
Abstract:
To enable good polishing and extension of service life of polishing pad in dressing the pad at the polishing work.
Setting of termination time of dressing a polishing pad by a polishing pad dresser 15a is carried out based on measurement of a current value of a motor 7a driving a surface plate 9a.
Inventors:
SAKUTA SHIGERU
Application Number:
JP26191399A
Publication Date:
April 03, 2001
Filing Date:
September 16, 1999
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B24B53/017; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
Norio Ogo (1 outside)
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