Title:
研磨方法及び研磨装置
Document Type and Number:
Japanese Patent JP4927438
Kind Code:
B2
Inventors:
Hiroshi Kurosawa
Application Number:
JP2006125109A
Publication Date:
May 09, 2012
Filing Date:
April 28, 2006
Export Citation:
Assignee:
Topcon Co., Ltd.
International Classes:
B24B13/00; B24B13/02
Domestic Patent References:
| JP2002178253A | ||||
| JP10086051A | ||||
| JP9300191A | ||||
| JP2000296449A | ||||
| JP59120548U |
Attorney, Agent or Firm:
Tamio Nishiwaki