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Title:
POLISHING METHOD
Document Type and Number:
Japanese Patent JP2011020241
Kind Code:
A
Abstract:

To prevent the occurrence of a recess in the rotation center of a workpiece.

The polishing method is used to polish a workpiece such that a polishing tool press-contacts the workpiece having an aspheric surface while it is being rotated, and scans the work piece along a scanning line passing its rotation center. In this method, at first, a shape to be removed per unit time of the tool is acquired with the use of a dummy workpiece, a tool remaining time distribution is calculated based on a target shape to be removed and the unit time removing shape of the tool, and a scanning speed of the tool is controlled. The dummy workpiece has an spherical surface having the same curvature radius as that of rotation center of the workpiece, and through the polishing of the spherical surface, the removing shape per unit time of the tool is acquired.


Inventors:
ANRAKU YOICHIRO
Application Number:
JP2009000169899
Publication Date:
February 03, 2011
Filing Date:
July 21, 2009
Export Citation:
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Assignee:
CANON KK
International Classes:
B24B49/02; B24B13/00; B24B49/10
Domestic Patent References:
JPH0557606A1993-03-09
JP2002052451A2002-02-19
JP2006095622A2006-04-13
Attorney, Agent or Firm:
近島 一夫
阪本 善朗



 
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