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Title:
POLISHING OBJECT HOLDING MATERIAL, METHOD FOR PRODUCING THE SAME AND POLISHING METHOD
Document Type and Number:
Japanese Patent JP2013094884
Kind Code:
A
Abstract:

To provide a polishing object holding material having wear resistance, and a polishing object holding material which is recyclable by restoring a used polishing object holding material used for chemical mechanical polishing to a form before use.

The polishing object holding material includes a fiber-reinforced resin layer and a thermosetting resin layer composed of a thermosetting resin composition on at least one face of the fiber-reinforced resin layer. The thermosetting resin layer is attained by a polishing object holding material characterized in that the material has a polishing rate of 35 μm/h or less in the following conditions, (A)-(F): (A) surface pressure: 700 gf/cm2, (B) number of revolutions of a table: 40 rpm, (C) number of revolutions of a chuck: 40 rpm, (D) polishing liquid: colloidal silica with a particle size of 70 nm or more, pH 12, a solid content concentration of 5%, (E) polishing liquid flow rate: 150 ml/min, (F) polishing time: 60 min.


Inventors:
KOHARA SHIGEYOSHI
Application Number:
JP2011239010A
Publication Date:
May 20, 2013
Filing Date:
October 31, 2011
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO
International Classes:
B24B37/28; B32B27/38; C08J5/12; H01L21/304
Domestic Patent References:
JP2002321151A2002-11-05
JP2010174094A2010-08-12
JP3135944U2007-10-04
JP2000167768A2000-06-20
JPH11309667A1999-11-09
JP2010036288A2010-02-18
JPS59112099A1984-06-28
Foreign References:
WO2010078312A12010-07-08