Title:
気泡を含有するCMP用研磨パッド
Document Type and Number:
Japanese Patent JP4118572
Kind Code:
B2
Inventors:
Kenji Nakatani
Masanori Abe
Eiji Yoshida
Masanori Abe
Eiji Yoshida
Application Number:
JP2002047643A
Publication Date:
July 16, 2008
Filing Date:
February 25, 2002
Export Citation:
Assignee:
Teijin Chemicals Ltd.
International Classes:
H01L21/304; B24B37/20; B24B37/24; B29C45/00; C08G61/06; C08J5/14; B29K45/00; B29K105/04; B29L31/00; C08L65/00
Domestic Patent References:
| JP2001071257A | ||||
| JP2001358101A | ||||
| JP2001253936A | ||||
| JP2002001650A | ||||
| JP2001253934A | ||||
| JP2002053614A | ||||
| JP2002011652A | ||||
| JP2000237951A |
Attorney, Agent or Firm:
Hideko Mihara