Title:
研磨パッドの溝形成方法
Document Type and Number:
Japanese Patent JP5484171
Kind Code:
B2
Inventors:
Toru Takasawa
Soichi Matsubara
Soichi Matsubara
Application Number:
JP2010095819A
Publication Date:
May 07, 2014
Filing Date:
April 19, 2010
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B37/26; B24B37/12; B24B37/20; H01L21/304
Domestic Patent References:
| JP2001198795A | ||||
| JP2009164414A | ||||
| JP200266905A | ||||
| JP2006167811A |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito