Title:
研磨パッド及びその製造方法
Document Type and Number:
Japanese Patent JP5274798
Kind Code:
B2
Inventors:
Kimura Kimura
Yoshiyuki Nakai
Tetsuo Shimomura
Atsushi Kazuno
Kazuyuki Ogawa
Yoshiyuki Nakai
Tetsuo Shimomura
Atsushi Kazuno
Kazuyuki Ogawa
Application Number:
JP2007213972A
Publication Date:
August 28, 2013
Filing Date:
August 20, 2007
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO.,LTD.
International Classes:
B24B37/11; B24B37/013; B24B37/20; H01L21/304
Domestic Patent References:
| JP2005167200A | ||||
| JP2006308986A | ||||
| JP2004163437A | ||||
| JP2003130876A | ||||
| JP11170371A | ||||
| JP8257474A | ||||
| JP2004327779A | ||||
| JP2006190826A | ||||
| JP2005271206A | ||||
| JP2000271862A | ||||
| JP4125445U |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi