研磨パッド、その製法及び研磨方法 - Asahi Chemical electronics incorporated company

Title:

研磨パッド、その製法及び研磨方法

Document Type and Number:

Japanese Patent JPWO2003058698

Kind Code:

A

Inventors:

Nakamura 淳
Shoichi Furukawa

Application Number:

JP2002013709W

Publication Date:

July 17, 2003

Filing Date:

December 26, 2002

Export Citation:

Assignee:

Asahi Chemical electronics incorporated company

International Classes:

(IPC1-7): H01L21/304; D06M15/555; B24B37/00

Attorney, Agent or Firm:

伊藤穣
武井英夫
清水猛
鳴井義夫

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