Title:
研磨パッドの製造方法
Document Type and Number:
Japanese Patent JP4294076
Kind Code:
B1
Inventors:
Fumio Miyazawa
Mitsunori Itoyama
Daisuke Takahashi
Naoki Takada
Mitsunori Itoyama
Daisuke Takahashi
Naoki Takada
Application Number:
JP2008132250A
Publication Date:
July 08, 2009
Filing Date:
May 20, 2008
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; C08J5/14; C08J9/224; C08L75/04; H01L21/304
Domestic Patent References:
| JP8500622A | ||||
| JP3425894B2 | ||||
| JP3801998B2 |
Attorney, Agent or Firm:
Toshiaki Igarashi