Title:
研磨パッド用シート及びその製造方法、研磨パッド及びその製造方法、並びに研磨方法
Document Type and Number:
Japanese Patent JP5923353
Kind Code:
B2
Inventors:
Kanazawa Kae
Fumio Miyazawa
Hirohito Miyasaka
Teppei Tateno
Tatsuma Matsuoka
Fumio Miyazawa
Hirohito Miyasaka
Teppei Tateno
Tatsuma Matsuoka
Application Number:
JP2012064249A
Publication Date:
May 24, 2016
Filing Date:
March 21, 2012
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/26; B24B37/24
Domestic Patent References:
| JP8197434A | ||||
| JP2001150332A | ||||
| JP2002504864A | ||||
| JP2003163192A | ||||
| JP2004186392A | ||||
| JP2010234458A |
Foreign References:
| US20100003904 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito