Title:
ポリッシングパッド
Document Type and Number:
Japanese Patent JP4963908
Kind Code:
B2
Abstract:
A method of forming a window (30) in a polishing pad (18) for use in a chemical mechanical polishing system (10). The method comprising replacing a portion of the polishing pad (18) with a solid element which is transmissive to light (34) from an interferometer (32) to provide a window (30) between a polishing surface (22) and a bottom surface (16) of the polishing pad (18).
Inventors:
Manuture Biran
Nils Joanson
Alan glaison
Gregory Pyatigorski
Nils Joanson
Alan glaison
Gregory Pyatigorski
Application Number:
JP2006248420A
Publication Date:
June 27, 2012
Filing Date:
September 13, 2006
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/304; B24B37/013; B24B37/20; B24B47/12; B24B49/02; B24B49/04; B24B49/12; B24B51/00; B24D7/12; B24D13/14; G01B11/06
Domestic Patent References:
| JP7052032A | ||||
| JP5309558A | ||||
| JP5102113A | ||||
| JP5080201A | ||||
| JP5226203A | ||||
| JP61076260A | ||||
| JP63134162A | ||||
| JP63165801A | ||||
| JP63039769A | ||||
| JP8316279A | ||||
| JP7285050A | ||||
| JP3234467A | ||||
| JP286128U |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori