Title:
Abrasive pad
Document Type and Number:
Japanese Patent JP6283940
Kind Code:
B2
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Inventors:
Masataka Takagi
Hirohito Miyasaka
Teppei Tateno
Kae Kae
Tatsuma Matsuoka
Takashi Saeki
Hirohito Miyasaka
Teppei Tateno
Kae Kae
Tatsuma Matsuoka
Takashi Saeki
Application Number:
JP2014069639A
Publication Date:
February 28, 2018
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/26; H01L21/304
Domestic Patent References:
| JP2005101585A | ||||
| JP2004140130A | ||||
| JP11285963A | ||||
| JP2006005339A |
Foreign References:
| WO2012102938A1 | ||||
| US5216843 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino