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Title:
研磨用シート
Document Type and Number:
Japanese Patent JP4550300
Kind Code:
B2
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Inventors:
Takao Ohno
Jiro Sadanobu
Application Number:
JP2001066306A
Publication Date:
September 22, 2010
Filing Date:
March 09, 2001
Export Citation:
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Assignee:
Teijin Limited
International Classes:
H01L21/304; B24B37/20; B24B37/24; C08J5/14; C08J9/28; C08L77/06
Domestic Patent References:
JP11221750A
JP2000343411A
Attorney, Agent or Firm:
Hideko Mihara



 
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