Title:
POLISHING TOOL, DEVICE AND METHOD OF POLISHING USING THE SAME
Document Type and Number:
Japanese Patent JP2011200941
Kind Code:
A
Abstract:
To evenly polish a surface of an article to be polished with respect to a polishing tool, a device and method of polishing using the same.
The polishing tool 1 includes a body 2 for polishing a face of the article T to be polished. The body 2 includes a recess 8, and a plurality of communication passages 10 that communicate the inner part with the outer part of the recess 8. One ends of a plurality of the communication passages 10 are communicated with the inner part of the recess 8, and the other ends are positioned outer than the one ends in the body 2 in a plan perspective view.
Inventors:
NARAHARA KENEI
Application Number:
JP2010067969A
Publication Date:
October 13, 2011
Filing Date:
March 24, 2010
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
B24B41/047; B24B37/00; B24B37/10