Title:
POLISHING TOOL, POLISHING FILM, AND ANALYZING METHOD
Document Type and Number:
Japanese Patent JP2011125974
Kind Code:
A
Abstract:
To enhance working efficiency in a polishing tool, a polishing film, and an analyzing method.
The polishing tool includes: a forefront portion 3 where the polishing film 10 is attached; a removable pressing member 5 with an inner surface 5a that fits with an outer circumferential side surface 3a of the forefront portion 3, and sandwiches the polishing film 10 between the inner surface 5a and the outer circumferential side surface 3a; protrusions 6 provided at a forefront side position from the pressing member 5 on the outer circumferential side surface 3a; and a detachable fixing tool 7 inserted between the protrusions 6 and the pressing member 5.
Inventors:
OZAKI MITSUO
NOGUCHI MICHIKO
USUI YASUHIRO
NOGUCHI MICHIKO
USUI YASUHIRO
Application Number:
JP2009287902A
Publication Date:
June 30, 2011
Filing Date:
December 18, 2009
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
B24D15/02; B24B21/00; B24D15/00
Domestic Patent References:
| JP2010076080A | 2010-04-08 |
Attorney, Agent or Firm:
Keizo Okamoto