Title:
POLISHING TOOL WITH FLUORORESIN AS BASE
Document Type and Number:
Japanese Patent JP2002144243
Kind Code:
A
Abstract:
To furnish corrosion resistance with a target to simultaneously realize mirror finished surface and high shaping precision.
This polishing tool is used as a polishing tool with porous fluororesin as a base and as a polishing tool with porous fluororesin mixed with diamond abrasive grains as a base.
Inventors:
INOUE SATOSHI
KOMURA AKIO
SHIMADA SHOICHI
KOMURA AKIO
SHIMADA SHOICHI
Application Number:
JP2000340109A
Publication Date:
May 21, 2002
Filing Date:
November 08, 2000
Export Citation:
Assignee:
INOUE SATOSHI
SHIMADA SHOICHI
SHIMADA SHOICHI
International Classes:
B24B37/20; B24B37/24; B24D3/00; B24D3/32; B24D7/00; C08J9/24; H01L21/304; (IPC1-7): B24D3/32; B24B37/00; B24D3/00; B24D7/00; H01L21/304
Domestic Patent References:
| JPS59219153A | 1984-12-10 | |||
| JPS63283857A | 1988-11-21 | |||
| JPH01193166A | 1989-08-03 |
Attorney, Agent or Firm:
Juichiro Yano
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