Title:
POLYESTER FILM FOR DRY FILM RESIST
Document Type and Number:
Japanese Patent JP2002062661
Kind Code:
A
Abstract:
To provide a polyester film for a dry film resist which has satisfying transparency, particularly transmittance for rays near the wavelength at 365 nm, sliding property, winding property and resolution.
The polyester film for a dry film resist is a laminated film prepared by forming an easy sliding layer on one or both surfaces of a biaxially oriented polyester film having the thickness of ≥12 μm and ≤25 μm. The haze of the laminated film is ≤1% and the transmittance for rays at 365 nm wavelength is ≥86%.
Inventors:
MIZUTANI KEI
KUBO KOJI
KUBO KOJI
Application Number:
JP2000248503A
Publication Date:
February 28, 2002
Filing Date:
August 18, 2000
Export Citation:
Assignee:
TEIJIN LTD
International Classes:
G03F7/09; B05D7/04; B32B27/36; C08G63/688; C08K3/00; C08L33/04; C08L67/02; G03F7/004; H05K3/00; (IPC1-7): G03F7/09; B32B27/36; C08G63/688; C08K3/00; C08L33/04; C08L67/02; G03F7/004; H05K3/00
Attorney, Agent or Firm:
Maeda Junhiro
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