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Patent Searching and Data


Title:
POLYESTER FILM
Document Type and Number:
Japanese Patent JP2000094507
Kind Code:
A
Abstract:

To provide a film which, when used as the support layer of a photoresist film for forming a circuit on a base having fine unevenness, indicates excellent base-followability to the fine unevenness, can prevent the generation of defects in the circuit, and is high in transparency and low in film haze.

A biaxially oriented polyester film having trimethylene terephthalate units of at least 80 mole % of the total repeating units is used as the support layer of a photoresist film which has a coefficient of surface orientation (ns) of 0.030-0.115.


Inventors:
FURUYA KOJI
KAWAI SHINICHI
Application Number:
JP27137998A
Publication Date:
April 04, 2000
Filing Date:
September 25, 1998
Export Citation:
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Assignee:
TEIJIN LTD
International Classes:
C08J5/18; B29C55/12; G03F7/004; B29K67/00; B29L7/00; (IPC1-7): B29C55/12; C08J5/18
Attorney, Agent or Firm:
Maeda Junhiro