NEW MATERIAL:The polyfunctional acylsilane compound of formula I {A is -O-R-O- or -NH-R-NH- [R is -(CH2)n- (n is 1W12) or group of formula II (R2 is H, alkyl, etc.)]; R1 is unsubstituted alkyl or aryl}.
EXAMPLE: Bisacylsilane of formula III (Me is methyl).
USE: A photo-crosslinking agent having high sensitivity and suitable as a negative photo-resist for the production of integrated circuits.
PREPARATION: The objective compound can be produced e.g. by (1) reacting 4-hydroxybenzaldehyde of formula IV with 1,3-propanediol in chloroform in the presence of HCl gas, (2) reacting the resultant compound of formula V with dibromomethane to obtain the compound of formula VI, (3) reacting the compound successively with n-butyllithium and chlorosilane in THF and finally (4) hydrolyzing the resultant 2-silyl-1,3-dithiane derivative.
RICHIYAADO BUIKARI
JIYUSHIENGU GUU
