PURPOSE: To provide a new polyfunctional vinyl ether compd. which, when the balance between phenolic hydroxyl groups and vinyloxyalkyl groups in its molecule is properly adjusted, gives a photosensitive resin which has a good surface curability without exhibiting the polymn. inhibition due to oxygen.
CONSTITUTION: This polyfunctional vinyl ether compd. is represented by formula I [wherein (n) is 0-20; R1 to R3 are each H, a 10C or lower alkyl group, etc.; and each of Q which appears n+2 times is OH or a group of formula II provided the molar ratio of (OH/group of formula II) of all the molecules is on average (0/100)-(95/5)] and is produced by reacting a phenol novolak compd. represented by formula III (wherein all the symbols are the same as in formula I) with a glycidyl vinyl ether. The molar ratio of the glycidyl vinyl ether to the hydroxyl group in the phenol novolak compd. can be adjusted within the range of 0.05-1.5. The compd. can be applied to various uses as a photosensitive resin and is esp. suitable for a negative photoresist.
NAKAGAWA HIROYA
TAKEBE KAZUO
Next Patent: PRODUCTION OF HIGH-MOLECULAR-WEIGHT NOVOLAK