POLY(IMIDE-BENZOXAZOLE) COPOLYMER - INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Title:

POLY(IMIDE-BENZOXAZOLE) COPOLYMER

Document Type and Number:

Japanese Patent JP3653499

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a poly(imide-benzoxazole) (PIBO) copolymer using, as raw materials, a trimellitic anhydride halide monomer and a bis(o- diaminophenol) monomer.
SOLUTION: This PIBO copolymer has the following repeating unit, wherein X is-O-,-S-,-C(CF3)2-,-C(CH3)2-,-CO-,-CH2-,-SO2-,-SO-, or a bond; and n is an integer. This PIBO copolymer has a hydroxy group having excellent adhesion to semiconductor substrates, and is particularly useful for dielectric layers of semiconductor devices.

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Inventors:

Cai
Xu Lian
Original product

Application Number:

JP2002002303A

Publication Date:

May 25, 2005

Filing Date:

January 09, 2002

Export Citation:

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Assignee:

INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

International Classes:

C08G73/06; C08G73/16; C08G73/18; C08G73/22; C09D177/06; C08J5/18; C09D179/04; C09J177/06; C09J179/04; D01F6/74; (IPC1-7): C08G73/06; C08J5/18; C09D179/04; D01F6/74

Domestic Patent References:

JP2001081191A
JP2000143803A
JP11236449A
JP2001238428A
JP3200839A
JP62207332A

Foreign References:

WO2001034679A1

Attorney, Agent or Firm:

Sota Asahina
Kei Saki
Fumio Akiyama
Hiromu Tanaka

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