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Title:
POLYMER FOR PHOTORESIST AND COMPOSITION COMPRISING THE SAME
Document Type and Number:
Japanese Patent JP2010100842
Kind Code:
A
Abstract:

To provide a polymer for photoresist suitable for short wavelength lithography, excellent in performance such as resolution and sensitivity and having a satisfactory line width roughness, forming a lithograph with satisfactory productivity and operability, and to provide a photoresist composition comprising the same.

The polymer comprises a structural unit represented by formula (I), and a structural unit represented by formula (II), wherein X represents a linear or branched 1-6C alkylene. The photoresist composition comprises the polymer and an acid generator generating an acid by light exposure.


Inventors:
ANDO NOBUO
HASHIMOTO KAZUHIKO
Application Number:
JP2009220078A
Publication Date:
May 06, 2010
Filing Date:
September 25, 2009
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C08F212/14; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
JPH0973173A1997-03-18
JPH08137107A1996-05-31
JP2007249192A2007-09-27
JPH0973173A1997-03-18
Attorney, Agent or Firm:
Patent business corporation Yuko patent office