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Patent Searching and Data


Title:
POLYMER AND POSITIVE TYPE RESIST MATERIAL AND METHOD FOR FORMING PATTERN USING THE SAME
Document Type and Number:
Japanese Patent JP2004107377
Kind Code:
A
Abstract:

To provide a positive type resist material having high sensitivity and high resolution, exposure margin and process adaptability exceeding those of a conventional positive type resist material and a good pattern shape after exposure, especially high irradiation resistance and transparency for a light source at a short wavelength such as vacuum ultraviolet light and further exhibiting excellent etching resistance.

A polymer has a repeating unit represented by general formula (1) and a weight-average molecular weight within the range of 1,000-500,000. The positive type resist material is characterized by compounding the polymer as a base resin.


Inventors:
HATAKEYAMA JUN
HARADA YUJI
Application Number:
JP2002268258A
Publication Date:
April 08, 2004
Filing Date:
September 13, 2002
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
G03F7/039; C08F210/02; C08F232/08; H01L21/027; (IPC1-7): C08F232/08; C08F210/02; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Mikio Yoshimiya