Title:
POLYMERIZABLE MONOMER AND ITS PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP2008115148
Kind Code:
A
Abstract:
To provide a polymerizable monomer and its production method that can give a polymer having a naphthyl-group skeleton containing a hydrophilic group for contributing to improvement in line edge roughness in a resist, good copolymerizability with a polymerizable monomer such as (meth)acrylic acid or a (meth)acrylic ester, uniform composition and high light transmittance at a wave length of 193 nm.
In the production method for the polymerizable monomer, a polymerizable monomer with a specific naphthalene skeleton is reacted with a specific monomer under specific conditions.
Inventors:
NAKAMURA MASA
MOMOSE AKIRA
KATO OSAMU
MOMOSE AKIRA
KATO OSAMU
Application Number:
JP2006352136A
Publication Date:
May 22, 2008
Filing Date:
December 27, 2006
Export Citation:
Assignee:
MITSUBISHI RAYON CO
International Classes:
C07C69/54; C07C67/10; C07C69/96; G03F7/039; H01L21/027; C08F18/10; C08F20/30
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