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Title:
POLYMERIZABLE UNSATURATED COMPOUND FOR PHOTORESIST AND RESIN COMPOSITION FOR PHOTORESIST
Document Type and Number:
Japanese Patent JP2001166481
Kind Code:
A
Abstract:

To obtain a polymerizable unsaturated compound for a photoresist suitable for obtaining a stable high molecular compound for a photoresist which does not cause a change with the elapse of time.

The polymerizable unsaturated compound used as a monomer of a high molecular compound for a photoresist has ≤200 (mg-KOH/g) acid value and may be a compound of formula 1 [where Ra is H or methyl; Rb and Rc are the same or different and are each H or a hydrocarbon group which may have a substituent, Rb and Rc may bond to each other to form an alicyclic hydrocarbon ring which may have a substituent together with adjacent C; X is a combining group; the ring Z is a mono- or polycyclic aromatic or alicyclic hydrocarbon ring which may have a substituent; and (i), (j) and (k) are each 0 or 1].


Inventors:
TSUTSUMI KIYOHARU
ARAI TAKASHI
TSUNO MASUMI
MICHITSU KUNIHIKO
Application Number:
JP34695899A
Publication Date:
June 22, 2001
Filing Date:
December 06, 1999
Export Citation:
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Assignee:
DAICEL CHEM
International Classes:
G03F7/039; C07C69/54; C08F20/16; C08F20/26; (IPC1-7): G03F7/039; C07C69/54; C08F20/16
Attorney, Agent or Firm:
Yukihisa Goto