Title:
PORTABLE VACUUM PINCETTE
Document Type and Number:
Japanese Patent JPH05337867
Kind Code:
A
Abstract:
PURPOSE: To provide a portable vacuum pincette connected to a portable small pump so as to be used in any place.
CONSTITUTION: This portable vacuum pincette is capable of sucking a semiconductor wafer, a sucked object, by vacuum suction in the manufacturing process of a semiconductor device. This vacuum pincette is driven by the on/off operation of a drive switch 12, and in the 'on' state of the drive switch 12, the semiconductor wafer 14 is sucked to the suction part 13 of the vacuum pincette 11. The vacuum pincette 11 is connected to a portable small pump 17 with a built-in filter 16, through a flexible tube 15 of the specified length, and a small and chargeable battery 18 is connected in the replaceable state to the small pump 17.
Inventors:
TANAKA HIROMASA
MIYAMA YOSHIO
KOYAIZU AKIO
MIYAMA YOSHIO
KOYAIZU AKIO
Application Number:
JP14739792A
Publication Date:
December 21, 1993
Filing Date:
June 08, 1992
Export Citation:
Assignee:
HITACHI LTD
HITACHI MICOM SYST KK
HITACHI MICOM SYST KK
International Classes:
B25J15/06; B65G49/07; H01L21/68; H01L21/683; (IPC1-7): B25J15/06; H01L21/68
Attorney, Agent or Firm:
Yamato Tsutsui