POSITION ADJUSTING METHOD OF MULTISTAGE LENS, LENS ASSEMBLING DEVICE, AND LENS INSPECTION DEVICE

Japanese Patent JP2004177334

A

To provide a device for which aberrations are reduced, when a lens position can not adjust from the lines due to a tolerance of each lens in a multistage lens, on a position-adjusting method of the multistage lens, a lens assembling device and a lens inspection device.

The device comprises a means for changing a relative position among the lenses 2, 3 in the multistage lens 1, a means for irradiating a parallel light to the multistage lens 1, a diffraction/reflection means 4 for diffracting and reflecting a light condensed by the multistage lens 1, and a means for observing the interference patterns of reflected zeroth-order diffracted light 6 and ± first-order diffracted light 7, 8. Then the distance between the lens 2 and the lens 3 is adjusted, by comparing an interference pattern which is detected before the change in the relative position between the lens 2 and the lens 3 with the interference pattern, which is detected after the change of the relative position between the lens 2 and the lens 3.

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MIYAGAWA AYU
YABUKI AKIHIKO
HOKARI MAMORU
AKEMA SHIGERU

JP2002345938A

June 24, 2004

November 28, 2002

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FUJITSU LTD

G01B9/02; G01B11/00; G01M11/02; G02B7/02; G11B7/08; G11B7/22; (IPC1-7): G01B11/00; G01B9/02; G01M11/02; G02B7/02; G11B7/08; G11B7/22

Manabe Kiyoshi
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito

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