Title:
POSITION ADJUSTMENT APPARATUS, AND ADJUSTMENT METHOD OF PLATING APPARATUS
Document Type and Number:
Japanese Patent JP2020176303
Kind Code:
A
Abstract:
To improve a position adjustment apparatus used in a plating tank.SOLUTION: A position adjustment apparatus for adjusting positions of a plurality of members disposed in a plating tank includes a first jig that is provided at a position where a base plate holder of the plating tank is provided. The first jig includes at least one first measuring apparatus including an optical sensor that measures a distance to a first adjustment target, and a mirror that reflects light from the optical sensor and changes a direction of the light.SELECTED DRAWING: Figure 15
Inventors:
TAMURA SHO
Application Number:
JP2019079486A
Publication Date:
October 29, 2020
Filing Date:
April 18, 2019
Export Citation:
Assignee:
EBARA CORP
International Classes:
C25D21/12; C25D7/12; C25D17/06; C25D17/08; G02B7/00
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Tatsumi Ono
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Tatsumi Ono
Makoto Watanabe