Title:
POSITION CORRECTION DEVICE AT TIME OF CARRIER TRANSFER FOR TRACKLESS MOVING ROBOT
Document Type and Number:
Japanese Patent JPH1135133
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To prevent interruption of a carrier between a position correction mark and camera at the carrier holding time, in a trackless moving robot. SOLUTION: The truck 6 of a moving robot holds a carrier 2 on the truck 6 from the state stopped in front of a device 5 and the position correction mark 4 on the device 5 is read by a camera 3 installed on the chuck 1 of the arm tip of the moving robot under the state holding the carrier 2 and the shift amount of the stop position of the moving robot is recognized from the result. Thereafter, the track is corrected by the shift amount of the stop position of the moving robot and the carrier 2 is lowered to the prescribed position on the device 5 and returned to an original stand-by position.
Inventors:
AKUTSU OSAMU
Application Number:
JP21022397A
Publication Date:
February 09, 1999
Filing Date:
July 22, 1997
Export Citation:
Assignee:
NIPPON STEEL SEMICONDUCTOR CO
International Classes:
B65G43/00; B25J15/08; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): B65G43/00; B25J15/08; H01L21/68
Attorney, Agent or Firm:
Takaharu Takita