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Patent Searching and Data


Title:
POSITION CORRECTION METHOD AND DEVICE, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2006120660
Kind Code:
A
Abstract:

To provide a position correction method and a position correcting device for achieving high focus precision even if a detection waveform is an asymmetric signal.

A position detector detects the position of a body to be exposed to light by applying light, and comprises a detection step that is a position correction method for correcting detected position information and detects a first waveform that is a position signal from the reflection light from the body to be exposed to light, a step for decomposing the first waveform and generating a plurality of second waveforms, and a step for removing a waveform containing a first asymmetric component from the plurality of second waveforms so that the first waveform becomes symmetrical and correcting the first waveform.


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Inventors:
SUZUKI TAKEHIKO
Application Number:
JP2004303679A
Publication Date:
May 11, 2006
Filing Date:
October 19, 2004
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G01B11/00; G03F7/207
Attorney, Agent or Firm:
Ryosuke Fujimoto