Title:
POSITION-DETECTING APPARATUS
Document Type and Number:
Japanese Patent JPS61271833
Kind Code:
A
Abstract:
PURPOSE:To enable a position of image patterns to be reliably detected with small templates even if the image is a two-dimensional binary image containing noises, by performing the pattern matching along a linear processing region intersecting a specific pattern, and detecting the positional coordinates at the point where the linear region intersects the specific pattern. CONSTITUTION:A linear Y-direction processing region Ty is set with respect to the Y direction and the template matching is performed with the use of templates 2a and 2b. If no proper point is found in this processing region Ty, for example if two matching points cannot be determined because of noises or the like, the setting of the processing region is successively changed and the processing is continued until a proper point yp1 is obtained. When one proper point yp1 is obtained, the processing region Ty is further changed so that another proper point yp2 is found. The straight line connecting these proper points yp1 and yp2 is determined as l$1. A similar linear X-direction processing region Tx is set with respect to the X direction so that proper points xp1 and xp2 as well as the straight line l2 connecting these points are obtained. A marking position P is determined as the intersecting point of these straight lines l1 and l2.
Inventors:
SUZUKAWA HIROKI
SATO RYUICHI
SATO RYUICHI
Application Number:
JP11319585A
Publication Date:
December 02, 1986
Filing Date:
May 28, 1985
Export Citation:
Assignee:
CANON KK
International Classes:
G03F9/00; G05D3/12; H01L21/027; H01L21/30; H01L21/67; H01L21/68; (IPC1-7): G03F9/00; G05D3/12; H01L21/68
Attorney, Agent or Firm:
Tatsuo Ito