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Patent Searching and Data


Title:
POSITION DETECTING DEVICE
Document Type and Number:
Japanese Patent JP2001050709
Kind Code:
A
Abstract:

To provide a position detecting device capable of detecting a position in the direction orthogonal to the laser beam.

A horizontal polarization from a laser oscillating tube 10 is separated from a main optical path ML by a polarization beam splitter 14, and guided to a first cross optical path CL1. The first cross optical path reflects the incident light in the same direction and is provided with diffraction gratings 18, 22 arranged in the upper cut chevron shape. The laser beam having passed through the first cross optical path reaches a light receiving element 38 along the main optical path. On the other hand, a vertical polarization from the laser oscillating tube 10 is separated from the main optical path ML by a second polarization beam splitter 16, and guided to a second cross optical path LC2. The second cross optical path has the diffraction gratings 20, 24 arranged in the upper cut chevron shape in the inverted direction of those of the first cross optical path. The laser beam having passed through the second cross optical path reaches the light receiving element 38 along the main optical path. Lengths of these two laser beams are independently varied corresponding to a moving amount of a moving table 12, which are detected on the basis of the interference of two laser beam to detect a position.


Inventors:
YAKU TORU
Application Number:
JP22446599A
Publication Date:
February 23, 2001
Filing Date:
August 06, 1999
Export Citation:
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Assignee:
MITUTOYO CORP
International Classes:
G01B11/00; (IPC1-7): G01B11/00
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)