Title:
POSITION DETECTION APPARATUS
Document Type and Number:
Japanese Patent JP3526043
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a position detection apparatus by which a position can be detected with high reproducibility and precisely by a method wherein a moving part is fixed to a fixation part by a deformable support member and it is coupled to an object, to be detected, by a coupling part.
SOLUTION: When an object S to be detected is moved to the direction of a leaf spring 50, a coupling member 60 moves a scale 30, which has been coupled to it, to the same direction. In addition, also a mounting plate 40 to which the scale 30 has been fixed 41 is going to move in the same manner, and springs 50, 50 upper ends of which have been fixed respectively to the plate 40 are deformed elastically to the movement direction of the object S by making use of the mounting part of a lower-end base 20 as a fulcrum. As a result, the plate 40 is moved to the base 20 by a distance (d) in the same direction as the object S. Consequently, the scale 30 is moved relatively to a fixed positional-information readout means 70 so as to match the movement amount of the object S. The means 70 detects the movement amount of the object S and its position after its movement on the basis of a periodic change in a quantity of light at a light-emitting part and a light-receiving part caused by its relative movement. Thereby, it is possible to prevent a measuring error when the object is rattled in its movement and a contact is worn, and the position can be detected with high reproducibility and precisely.
Inventors:
Arai, Makoto
Katsura, Koichi
Katsura, Koichi
Application Number:
JP21990995A
Publication Date:
May 10, 2004
Filing Date:
August 29, 1995
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01D5/26; G01B21/00; (IPC1-7): G01B21/00
Attorney, Agent or Firm:
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